JPH0530348Y2 - - Google Patents
Info
- Publication number
- JPH0530348Y2 JPH0530348Y2 JP595488U JP595488U JPH0530348Y2 JP H0530348 Y2 JPH0530348 Y2 JP H0530348Y2 JP 595488 U JP595488 U JP 595488U JP 595488 U JP595488 U JP 595488U JP H0530348 Y2 JPH0530348 Y2 JP H0530348Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- light
- exposure
- unnecessary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 11
- 239000013307 optical fiber Substances 0.000 claims description 8
- 230000032258 transport Effects 0.000 claims description 5
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 76
- 238000000034 method Methods 0.000 description 27
- 230000002093 peripheral effect Effects 0.000 description 18
- 238000012545 processing Methods 0.000 description 15
- 239000000835 fiber Substances 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 10
- 238000012546 transfer Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- 238000004528 spin coating Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 230000018109 developmental process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000007261 regionalization Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- -1 debris Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595488U JPH0530348Y2 (en]) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595488U JPH0530348Y2 (en]) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112040U JPH01112040U (en]) | 1989-07-27 |
| JPH0530348Y2 true JPH0530348Y2 (en]) | 1993-08-03 |
Family
ID=31209778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP595488U Expired - Lifetime JPH0530348Y2 (en]) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530348Y2 (en]) |
-
1988
- 1988-01-22 JP JP595488U patent/JPH0530348Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01112040U (en]) | 1989-07-27 |
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